drylin® linear systems for cleanrooms

For the linear guide system drylin® NK-02-40-02 by igus® SE & Co. KG, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2μm, 0.3μm, 0.5μm, and 5μm with motion speed of v =1m/s, to clearly derive suitability for cleanrooms classified as ISO Class 6 according to DIN EN ISO 14644-1."  The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system drylin® NK-02-40-02 can be classified as "level 1" (highest rank). Fraunhofer IPA Report No.: IG 0308- 295 73

For the linear guide system drylin® TK-01-30-01 by igus® SE & Co. KG, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2μm, 0.3μm, 0.5μm and 5μm with motion speed of v = 0.1m/s, to clearly derive suitability for cleanrooms classified as ISO Class 3 according to DIN EN ISO 14644-1.

For the linear guide system drylin® TK-01-25-02 by igus® SE & Co. KG, it is possible, on the calculations of the likelihood of violation of threshold values of the detection sizes 0.2μm, 0.3μm, 0.5μm and 5μm with motion speed of v = 1m/s, to clearly derive suitability for cleanrooms classified as ISO Class 5 according to DIN EN ISO 14644-1." "The measurement results of the ESD compatibility according to SEMI E78-0998 show that the linear guide system drylin® TK-01-25-02 can be classified as "level 1" (highest rank).